氢化非晶/纳米晶相变阈硅薄膜的研制和特性分析
| Contribuinte(s) |
廖显伯 孔光临 |
|---|---|
| Data(s) |
2002
|
| Resumo |
Submitted by zhangdi (zhangdi@red.semi.ac.cn) on 2009-04-13T11:45:31Z Made available in DSpace on 2009-04-13T11:45:31Z (GMT). Made available in DSpace on 2009-07-09T01:35:44Z (GMT). No. of bitstreams: 1 disk/eh2002/zsb.pdf: 2524102 bytes, checksum: a4f8c4c9fedb745fcb3373518880fe92 (MD5) Previous issue date: 2002 |
| Identificador | |
| Idioma(s) |
中文 |
| Fonte |
张世斌.氢化非晶/纳米晶相变阈硅薄膜的研制和特性分析.[博士].北京.中国科学院半导体研究所.2002 |
| Palavras-Chave | #材料物理与化学 |
| Tipo |
学位论文 |
