BPM方法原理及其在SOI结构中应用


Autoria(s): 张小峰
Contribuinte(s)

余金中

Data(s)

2001

Resumo

Submitted by zhangdi (zhangdi@red.semi.ac.cn) on 2009-04-13T11:45:31Z

Made available in DSpace on 2009-04-13T11:45:31Z (GMT).

Made available in DSpace on 2009-07-09T01:35:37Z (GMT). No. of bitstreams: 1 disk/eh2001/zxf.pdf: 8994104 bytes, checksum: ad927e1ab927ea959e277f5f792a841b (MD5) Previous issue date: 2001

Identificador

http://ir.semi.ac.cn/handle/172111/5063

http://www.irgrid.ac.cn/handle/1471x/60093

Idioma(s)

中文

Fonte

张小峰.BPM方法原理及其在SOI结构中应用.[硕士].北京.中国科学院半导体研究所.2001

Palavras-Chave #微电子学和固体电子学
Tipo

学位论文