硅基键合技术的理论和工艺研究
| Contribuinte(s) |
余金中 |
|---|---|
| Data(s) |
2001
|
| Resumo |
Submitted by zhangdi (zhangdi@red.semi.ac.cn) on 2009-04-13T11:45:31Z Made available in DSpace on 2009-04-13T11:45:31Z (GMT). Made available in DSpace on 2009-07-09T01:35:35Z (GMT). No. of bitstreams: 1 disk/eh2001/hwh.pdf: 7378691 bytes, checksum: 1b6aca9badd9e71ffa42ff9a816d4519 (MD5) Previous issue date: 2001 |
| Identificador | |
| Idioma(s) |
中文 |
| Fonte |
韩伟华.硅基键合技术的理论和工艺研究.[博士].北京.中国科学院半导体研究所.2001 |
| Palavras-Chave | #微电子学与固体电子学 |
| Tipo |
学位论文 |
