Y2O3 stabilized ZrO2 thin films deposited by electron-beam evaporation:Optical properties, structure and residual stresses
Data(s) |
2009
|
---|---|
Identificador | |
Idioma(s) |
中文 |
Fonte |
肖祁陵,许程,邵淑英,邵建达,范正修.Y2O3 stabilized ZrO2 thin films deposited by electron-beam evaporation:Optical properties, structure and residual stresses.Vacuum,2009,83:366-371 |
Palavras-Chave | #YSZ thin films #Residual stress #Electron-beam evaporation #Refractive index #Structural properties |
Tipo |
期刊论文 |