Effect of amorphous C films deposited by RF magnetron sputtering on smoothing

Autoria(s): Songwen Deng; Hongji Qi; Chaoyang Wei; Kui Yi; Zhengxiu Fan; Jianda Shao
Data(s)

2009
Identificador

http://ir.siom.ac.cn/handle/181231/6656

http://www.irgrid.ac.cn/handle/1471x/12998
Idioma(s)

中文
Fonte

Songwen Deng,Hongji Qi,Chaoyang Wei, Kui Yi ,Zhengxiu Fan, Jianda Shao.Effect of amorphous C films deposited by RF magnetron sputtering on smoothing.Applied Surface Science,2009,256:1492-1495
Palavras-Chave #其他
Tipo

期刊论文
Acesso ao item digital