Optical properties and microstructure of Ta2O5 thin films prepared by oblique angle deposition


Autoria(s): Xiudi Xiao(肖秀娣); Guoping Dong; Hongbo He; Hongji Qi; Zhengxiu Fan; and Jianda Shao
Data(s)

10/10/2009

Identificador

http://ir.siom.ac.cn/handle/181231/6559

http://www.irgrid.ac.cn/handle/1471x/12979

Idioma(s)

中文

Fonte

Xiudi Xiao,Guoping Dong ,Hongbo He, Hongji Qi,Zhengxiu Fan,and Jianda Shao.Optical properties and microstructure of Ta2O5 thin films prepared by oblique angle deposition.CHINESE OPTICS LETTERS,2009,7(10):

Tipo

期刊论文