Optical properties and microstructure of Ta2O5 thin films prepared by oblique angle deposition
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10/10/2009
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中文 |
Fonte |
Xiudi Xiao,Guoping Dong ,Hongbo He, Hongji Qi,Zhengxiu Fan,and Jianda Shao.Optical properties and microstructure of Ta2O5 thin films prepared by oblique angle deposition.CHINESE OPTICS LETTERS,2009,7(10): |
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期刊论文 |