倾斜沉积制备雕塑薄膜的研究进展

倾斜沉积是一种新型的薄膜沉积技术。通过制备过程中基片的旋转和倾斜,可以制备出斜柱状、之字形、螺旋状、S形以及C形等各种形状的雕塑薄膜。雕塑薄膜可以实现许多传统薄膜无法实现的光学性质,为光学薄膜的设计与制备开辟了新的途径。本文综述了雕塑薄膜的制备方法,分析了雕塑薄膜的结构特征及影响因素,并阐述了其在光学领域的广泛应用前景。

Glancing angle deposition is a new technology for thin film preparation. The sculptured thin film (STF) with a variety of shape, such as oblique nanocolumns, zigzag, helix, S-shape, C-shape, and so on can be prepared by substrate rotating and sloping into glancing angle during process. The sculptured thin film with extraordinary optical properties provides a new direction for film design and preparation compared with traditional films. In this paper, the preparation method for sculptured thin film was summarized, the microstructure and preparation parameters of STF analyzed, also its potential application in optical field described. Key