Y_2O_3稳定ZrO_2薄膜的结构和光学特性

用电子束蒸发法制备出四种不同Y2O3含量的Y2O3稳定ZrO2（YSZ）薄膜,用X射线衍射和透射光谱测定薄膜的结构和光学性能.结果表明：随着Y2O3含量的增加,ZrO2薄膜从单斜相向高温相（四方相和立方相）转变,获得了结构稳定的YSZ薄膜;YSZ薄膜的晶粒尺寸都比ZrO2薄膜的大,但随着Y2O3加入量的增加,晶粒尺寸有减小的趋势,薄膜表面也趋向光滑平整.所有YSZ薄膜的透射谱线都与ZrO2薄膜相似,在可见光和红外光区都有较高的透过率.Y2O3的加入还可以改变薄膜的折射率,在一定范围内可得到所需的任意折射率

abstract {Four kinds of Y₂O₃ stabilized ZrO₂ (YSZ) thin films with different Y₂O₃ content have been prepared by electron-beam evaporation method. The structural and optical properties of thin films were measured by X-ray diffraction spectra and transmission spectra. These results indicate that ZrO₂ thin film changes from monoclinic phase to high temperature phase (tetragonal and cubic) with the increase of Y₂O₃ content and the structural stabilized thin films are obtained; the grain sizes of YSZ thin films are bigger than that of ZrO₂ thin film. However, the grain size of YSZ thin films would decrease with the increase of Y₂O₃ content. The transmission spectra of YSZ thin films are similar to that of ZrO₂ thin film and all of them have high transmission. Furthermore, the refractive index of YSZ thin films would change with the addition of Y₂O₃ and get the random refractive index in a certain range.}