线性共蒸法制备非均匀膜的误差特性模拟分析

对双源线性共蒸法制备的非均匀薄膜折射率分布与光学特性的关系作了探讨，并与均匀介质膜的光学特性作了对比；从折射率正变和负变两个方面．讨论了混合介质膜折射率不同变化规律对光学性能带来的影响；讨论了厚度误差和折射率极值误差对非均匀膜光学性能的影响。结果发现：折射率变化规律误差主要对非均匀膜的应用波段范围产生影响，而膜层厚度误差和折射率极值误差超过一定值时，将对薄膜光学特性产生重要影响。

The optical properties of inhomogeneous coatings which were prepared by double-source linear co-evaporation, were discussed and compared with that of homogeneous coatings. The influences of the refractive index distributions, maximum index-departure and coating thickness-deviation on the optical characteristics of coatings were discussed respectively. Analysis results show that the refractive-index distribution regularity error has important influence on the wavelength application range of the coatings, and the thickness error or index-departure has vital influence on the optical properties of inhomogeneous coatings.