氧碘激光器相位延迟片的制备与性能研究

多层介质反射镜在非正入射的时候，两个不同的偏振态之间会产生不同的相移。利用矩阵法，根据菲涅耳公式和电磁场边界条件，推导出p，s波的相移。通过优化设计．入射角为54°，在1285～1345nm之间p，s波获得了270°±1°的相移，同时也使反射率在99．5％以上。用离子束溅射技术制备相位延迟膜，用分光光度计测试了光谱特性和用椭偏仪测试了相位特性，在相应波段获得了262．4°±1．8°的相移，同时也使反射率在99．6％以上。误差的主要来源是离子源工作特性会产生不均匀的过渡层和最外层会吸收一些水气、灰尘等也产生

When incoming light beam enters dielectric reflective mirror with certain incident angle, there is phase shift between the p-polarization and s-polarization. In terms of Fresnel formulas and boundary conditions of electromagnetic field, the phase shift between p- and s-polarization was deduced with methods of matrix. Based on optimizing design, when light beam enters with 54 degree incident angle, phase shift of 270°±1° in the range of 1285～1345 nm was reached, at the same time, the reflectivity of dielectric mirror maintained is over 99.5%. The phase retarder was prepared with dual ion beam sputter system and then annealed at different temperatures in atmosphere, the spectrum and the phase of the sample were gained by spectrometer and the Fourier transform infrared spectroscopic ellipsometer, respectively. The results revealed that the as-deposited samples gained phase shift of 262.4°±1.8° and the reflectivity reaches over 99.6%. The error mainly originates from non-homogeneous transition layer, posed by working properties of ion source, and surface transition layer, resulting from surface adsorption for moisture and dust. The physical thickness and variety of refractive index for transition layer were gained from error analysis, and it was found that the error of the outermost layer and deviation of refractive index and designed values play a principal roles in decrease of phase shift.