石英晶体监控膜厚仪的发展与应用

石英晶体振荡监控光学薄膜厚度是直接监控光学薄膜物理厚度的方法，与工作波段无关，设置简单，各种厚度皆可控制．易于实现自动控制，将会越来越广泛地应用在光学薄膜厚度监控中。本文首先介绍了石英晶体监控膜厚仪监控光学薄膜厚度的原理，然后讨论了石英晶体监控仪的发展和晶振片的稳定性。

Quartz crystal oscillation method is a dynamic method to monitor the thickness of optical coatings. It has many advantages, such as monitoring physical thickness, simple setting, easy auto- control, etc., so it is more and more widely used in monitoring the optical coatings. The principle of coating thickness monitoring by quartz crystal oscillation is described. The development and the stabilization of quartz crystal monitoring are introduced.