光学薄膜中界面层和表面吸附层对相位延迟的影响

多层介质反射镜在非正入射的时候，两个不同的偏振态之间会产生不同的相移．根据空气与膜层、膜层之间的实际情况，建立了界面层和表面吸附层模型，并运用它分析相位延迟产生误差的原因．通过优化设计，入射角为54°，在1285～1345nm之间p，s波获得了270±1°的相移，同时也使反射率在99．5％以上．用离子束溅射技术制备相位延迟膜，用分光光度计测试了光谱特性和用椭偏仪测试了相位特性，在相应波段获得了262．4±1．8°的相移，同时也使反射率在99．6％以上．误差的主要来源是离子源工作特性会产生不均匀的过渡层和最

When incoming light beam enters dielectric reflective mirror with a certain incident angle, there will be a phase shift between the p-polarization and s-polarization. The theoretical model for adhesion layer of interface and surface was established based on the real conditions of interface between layer and atmosphere, and between two neighboring layers. At the same time, this model was used to explain the reason for error of phase shift. Based on optimizing design, when light enters with 54 degree, the phase shift of 270 P was obtained in the range of 1285 similar to 1345 nm, meantime, the reflectivity of dielectric mirror maintained over 99.5%. The phase retarder film was prepared with dual ion beam sputter system. The spectrum and the phase of the sample were gained by spectrometer and the Fourier transform infrared spectroscopic ellipsomter, respectively. The results reveal that the samples have phase shift of 262.4 +/- 1.8 degrees and the reflectivity reaches over 99.6%. The error mainly originates from non-homogeneous transition layer induced by working properties of ion source, and surface transition layer induceded by a surface adsorption of moisture and dust. The physical thickness and variety of refractive index for transition layer are obtained from error analysis, and it is found that the error of the outermost layer and deviation of refractive index play principal roles in the decrease of phase shift.