宽禁带氧化锌半导体薄膜的研究进展

氧化锌作为新一代化合物半导体，其禁带宽度对应紫外光的波长。氧化锌薄膜有望开发蓝光、蓝绿光、紫外光等多种发光器件，具有广阔的应用前景。重点介绍了氧化锌薄膜的研究进展以及存在的问题，并对氧化锌薄膜的未来进行了展望。

As a new generation of compound semiconductor, zinc oxide has widegap. Zinc oxide thin film is a promising candidate for light emission devices for blue, blue-green, and UV regions. This paper presents the research progress, the existing problems and the prospects of zinc oxide functional thin films.