斜角入射沉积法制备渐变折射率薄膜的折射率分析

斜角入射沉积法是一种制备薄膜的新颖方法，它可以用来制备渐变折射率薄膜．本文首先探讨了膜料的沉积入射角为α，薄膜柱状生长倾斜角为β时的薄膜的填充系数；之后利用drude理论，分析研究了斜角入射沉积法制备渐变折射率薄膜的折射率与薄膜的入射角和生长方向的关系．

Glancing angle deposition is a novel method for the preparation of coatings, it can be used to prepare graded index coatings. In this paper, the packing factor of the coatings prepared by glancing angle deposition is analyzed under the conditions that the flux arrival angle of coating material is a and the columnar microstructure inclination angle of coatings is beta. And then the relation between the refractive index of the coatings, the flux arrival angle and the columnar inclination angle is discussed based on Drude theory.