Layer uniformity of glancing angle deposition
Data(s) |
2005
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Resumo |
Some results of an investigation on the layer thickness uniformity of glancing angle deposition are presented. A zirconia monolayer has been deposited by glancing angle deposition to analyze the layer thickness uniformity. The experimental results indicate that the thickness variation over the substrate is less than 0. 1%, which is considered as good uniformity. It is found that the non-uniformity of experimental results is larger than that of the theoretical results. (c) 2005 Elsevier Ltd. All rights reserved. |
Identificador | |
Idioma(s) |
英语 |
Fonte |
Wang JH;邵建达;Yi K;范正修.,Vacuum,2005,78(1):107-111 |
Palavras-Chave | #光学薄膜 #e-beam evaporation #glancing angle deposition #layer uniformity |
Tipo |
期刊论文 |