光学表面的标量散射理论

简要论述了标量散射理论的研究进展做,着重介绍了Beckman的一维标量散射理论和几种典型的多层膜散射模型-非相关表面粗糙度模型、附加表面粗糙度模型和非相关体内不均匀模型,比较了这些模型在中心波长为632.8nm的11层高反膜的散射特性.结果表明,非相关体内的不均匀性引起反射能带边缘散射,反射能带内的散射主要由附加表面粗糙度引起.理想粗糙度对膜系反射带内的散射影响很小,对反射带边缘几乎无影响.预测了标量散射理论的应用领域及前景.

The progress of researches on the scalar scattering theory is reviewed briefly, and the one-dimensional scattering theory presented by Beckmann and several typical scattering models such as the uncorrelated surface roughness model, the additive surface roughness and the uncorrelated bulk inhomogeneity model are introduced. Scattering properties of 11-layer reflector centered at 632.8nm under those models are compared. It is shown that the scattering at the band edges are due almost entirely to the uncorrelated layer thickness, while the scattering in the reflection band results from the additive surface roughness. The scattering caused by idea roughness in the reflection band is quite small and drops to a near zero value at the band edges.