Low temperature growth of c-axis oriented AlN films on γ-LiAlO2 by radio frequency magnetron sputtering

Autoria(s): Hao Teng; Shengming Zhou; Hui Lin; Taohua Huang; Ping Han; Rong Zhang
Data(s)

2009
Identificador

http://ir.siom.ac.cn/handle/181231/6845

http://www.irgrid.ac.cn/handle/1471x/12618
Idioma(s)

中文
Fonte

Hao Teng, Shengming Zhou, Hui Lin, Taohua Huang, Ping Han, Rong Zhang.Low temperature growth of c-axis oriented AlN films on γ-LiAlO2 by radio frequency magnetron sputtering.Journal of Alloys and Compounds,2009,469:
Palavras-Chave #其他
Tipo

期刊论文
Acesso ao item digital