导模法生长晶体研究进展

导模法是一种极具应用潜力的晶体生长方法,具有生长速度快,加工成本低的优点,广泛用于生长各种形状的晶体。对导模法的原理、特点和发展历史进行了简单介绍,着重论述了导模法在生长有形蓝宝石和硅晶体中的发展和应用,对目前导模法生长晶体过程中存在的问题做了简单的介绍。

The edge-defined film-fed crystal growth method (EFG) is considered an excellent method and it is widely used for growing shaped crystals because of its fast growth speed and low processing cost. The principle, characteristics and history of the EFG method are reviewed, the application of EFG in shaped crystal growth, such as sapphire and silicon, is discussed in particular. The problems in EFG growth crystals are discussed.