LiAlO2衬底上ZnO薄膜的溶胶-凝胶法制备和表征

采用溶胶凝胶法在LiAlO2（302）衬底上制备了ZnO薄膜。用X射线衍射（XRD）和扫描电镜（SEM）对样品的结构和形貌进行了表征。XRD结果表明,随着热处理温度的升高（350℃、450℃、550℃、600℃、800℃）,所得到的薄膜分别为单相ZnAl2O4（350℃）,ZnAl2O4和ZnO的混合相（450℃）以及单相的ZnO（550℃、600℃、800℃）,并且ZnO薄膜C轴择优取向的生长趋势随温度升高相应明显。SEM图像显示,随着热处理温度的升高,ZnO薄膜的粒径相应变大。

In this paper, ZnO thin film was deposited on LiA1O₂ (302) substrates by Sol-gel method. X-ray diffraction (XRD) shows that by enhancing the post-processing temperature (350°C, 450°C, 550°C, 600°C, 800°C), we have obtained single ZnAl₂O₄ phase (350°C), mixed phase of ZnAl₂O₄ and ZnO (450°C), as well as single phase ZnO(550°C, 600°C, 800°C), respectively. It also can be seen that the c-axis growth tendency also became stronger under higher temperatures. SEM images show that the sizes of the polycrystalline ZnO thin film particles become larger with the enhanced post-processing temperature.}