The growth of gamma-LiAlO2 layer with a highly-preferred orientation on (0001) sapphire


Autoria(s): 李抒智; Yang WQ; 周圣明; 徐军
Data(s)

2005

Resumo

Using vapor transport equilibration (VTE) technique we succeeded in the fabrication of single-phase gamma-LiAlO2 layer on (0001) sapphire substrate. X-ray diffraction indicated that the as-fabricated layer was highly textured with [100] orientation at proper VTE treatment temperature range from 1050 degrees C to 1100 degrees C. The main factors affecting the quality of the gamma-LiAlO2 layer were investigated by SEM and transmission spectra. These results reveal the possibility of fabricating gamma-LiAlO2 (100)//sapphire (0001) composite substrate for GaN-based epitaxial film by VTE.

Identificador

http://ir.siom.ac.cn/handle/181231/5785

http://www.irgrid.ac.cn/handle/1471x/12366

Idioma(s)

英语

Fonte

李抒智;Yang WQ;周圣明;徐军.,Sci. China Ser. E-Technol. Sci.,2005,48(1):116-120

Palavras-Chave #光学材料;晶体 #gamma-LiAlO2 #composite substrate #vapor transport equilibration
Tipo

期刊论文