柱状ZnO阵列薄膜的生长及其发光特性

采用一种设备简单、原料低廉的新型方法，在镀有ZnO先驱薄膜的（0001）蓝宝石上利用水热法制备出了柱状ZnO阵列薄膜．用扫描电镜（SEM），X射线衍射（XRD）对样品的形貌和结构进行了表征，结果显示ZnO薄膜为柱状阵列，基于蓝宝石衬底沿c轴择优生长，且（0004）摇摆曲线半高宽度（FWHM）约为1.8°。此ZnO阵列薄膜具有很强的紫外发射光谱（PL）．

A novel approach using low-cost and simple-equipment was successfully demonstrated on the growth of ZnO microrod array films. Scanning electron microscopy (SEM) and X-ray diffraction (XRD) has characterized the microstructure of the samples. The results indicate that ZnO microrod array films are hexagonal, highly oriented crystalline array films, grown along c-axis of ZnO on (0001) sapphire substrates. The FWHM is about 1.8 degrees for the (0004) rocking curve of the ZnO films. The photoluminescence spectra of ZnO array films show a strong and narrow peak at 395nm.