超分辨近场结构中Bubble微结构的远场光学特性分析

以菲涅尔-基尔霍夫衍射理论为基础,建立了超分辨近场结构中Bubble微结构对高斯光束的衍射模型.分析了PtOx型超分辨近场结构（PtOx-Type-Super-RENS）中Bubble微结构的远场光学特性.结果表明,设计的Bubble微结构形成过程的简化模型可基本反映超分辨近场结构中掩膜结构在激光作用下的结构变化过程,说明了高斯衍射模型是研究薄膜微结构变化的一种有效方法.

Based on Fresnel-Kirchhoff diffraction theory, a Gaussian diffraction model of the bubble in the Super-RENS has been set up. Results show that the simplified model of the bubble forming process proposed in this letter can denote the structural deformation process of the mask layer in Super-RENS irradiated by a Gaussian beam. It indicates that Gaussian diffraction model is an effective method for analyzing the minute structural deformation in thin film and can give a better understanding of the far-field readout mechanism of bubble structure.