高激光损伤阈值溶胶-凝胶ZrO2薄膜

采用醇热法水解氧氯化锆（ZrOCl2·8H2O）制备ZrO2溶胶，提拉法涂膜。采用粘度、粒度分布、折射率、IR、DSC、AFM等测试手段对溶胶和薄膜性能进行表征。结果表明，ZrO2溶胶颗粒的平均粒径为18．9nm，薄膜经300℃热处理后折射率可高达1．95，膜层表面均匀平整，表面平均粗糙度仅为0．561nm，膜层的激光损伤阈值为14J／cm^2（1064nm，1ns）。

ZrO2 Sol was prepared by controlling hydrolysis ZrOCl2 center dot 8H(2)O in heated alcoholic solution. The thin films were deposited by dip technique. The characterization of ZrO2 Sol was analyzed by viscosity, particle size analyzer, IR, DSC and AFM analysis. The results showed that the average size of sol particles was 18.9 nm; the refractive index of coatings treated at 300 degrees C was 1.95; the morphology of coatings surface was smooth, and its average roughness was only 0.561 nm. The laser induced damage threshold of ZrO2 coating was 14 j/cm(2) (1064 nm, 1 ns).