五自由度纳米级定位工作台的设计研究

提出一种新型的五自由度精密定位平台的工作原理及其设计方法。工作台采用柔性导向机构实现平移及转动功能，采用压电陶瓷作为驱动元件，外置纳米级电容传感器作为位移量测量反馈元件，采用数字PID控制方法，可以实现纳米级精度的定位。给出了多种形式柔性导向机构刚度计算公式及设计实例。

This paper presented a new type of 5-DOF nanopositioning stage, and the design theory and method was introduced. The linear and rotarymotions of the stage was guided by flexure hinges and driven by piezoelectric actuators. Capacitive position sensors with nanometer accuracy were fixed on the stage to detect the displacement of motion and provide feedback signals to controller. The equation of compliant mechanisms and a design case are also presented.