五自由度纳米级定位精度机构的研制

提出一种新型的五自由度精密定位平台的工作原理及其设计方法。工作台采用压电陶瓷作为驱动元件，柔性导向机构实现平移及转动功能。整个工作台可由整块金属材料通过线切割加工制成，实现一体化加工，而且结构紧凑。并给出导向机构刚度计算公式及设计实例。

This paper presents a new type of nanopositioning stage which has five degree of freedom; the stage is driven by piezoelectric actuators and guided by compliant hinges. The stage can be fabricated with an integrated metal through wire electro discharge machining and is compact. The equation of compliant mechanisms and a design case is also presented in this paper.