飞秒激光辐射下微突起结构形成的超快热弹性模拟

本文结合有限元方法和超快热弹性模型对飞秒激光辐射下形成的微突起结构进行了数值模拟研究。模拟结果表明微突起结构的形成与入射飞秒激光的参数以及材料的热弹性质有关。在圆锥状微突起结构的形状和高度方面，实验结果与模拟结果呈现良好的一致性，这也从实验上表明了超快热弹性模型的有效性。本文的研究将有助于利用超快激光对薄膜材料进行纳米构造。

Finite element method and ultrafast thermoelasticity model are combined to simulate the microbump formation irradiated by a femtosecond laser. It has been shown that the effect, of microbump formation is related to the characteristic of incident femtosecond laser and the thermoelasticity properties of the film. The numerical results exhibit good agreements with the experimental results in both the shape and height of the conical microbump structure. which verify the effectiveness of the ultrafast thermoelasticity model in experiments. It should be helpful for selecting appropriate materials for nanotexturing of thin films by ultrafast lasers.

Shanghai Science and Technology Committee [06SP07003, 0652nm005]; National "973" Program of China [2006CB806000]