掺铒磷酸盐玻璃离子交换波导表面保护的研究

对离子交换波导制备过程中掺铒磷酸盐玻璃表面的侵蚀问题进行了研究，分析了产生侵蚀的原因，提出镀K9玻璃薄膜的方法，对掺铒磷酸盐玻璃表面进行保护．采用光学显微镜和原子力显微镜对波导表面特性进行了表征。同时对平板波导的光学特性进行了测试．研究表明K9玻璃薄膜不仅能够对掺铒磷酸盐玻璃起到保护作用，同时允许交换离子透过进入磷酸盐玻璃形成波导层．

Surface corrosion of Er-doped phosphate glass during ion-exchange processing for optical waveguide fabrication is studied, the corrosion mechanism is analyzed, and a protection method by using K9 glass coating is proposed and demonstrated. The surface morphology is observed and analyzed by means of optical microscope and atomic force microscope. The optical characteristics of planar waveguide are measured. Experimental results show that the K9 glass film could not only protect the Er-doped phosphate glass surface but also give no influence on the waveguide fabrication.