低密度台阶形闪耀光栅的制作

介绍了制作低密度闪耀光栅的过程,在制作时,对传统的制作过程进行了改进,有效提高了制作质量。以40μm闪耀光栅为例介绍了制作的过程,得到了良好的光栅表面形貌,并且闪耀级次的衍射效率达到了70%以上。相比传统的制作方法,效率提高了5%～10%。对比了理论上的衍射效率,分析了实验误差,发现把存在对准误差的光栅进行处理将会有效地提高其衍射效率,为进一步提高闪耀光栅的衍射效率提供了依据。

The process of fabricating low-density blazed gratings is presented. Some novel improvements have been reported, which lead to gratings with better quality. In experiment, 40μm period blazed gratings with uniform surface are obtained, and the diffraction efficiency of the first order is more than 70%. Compared with traditional method, the efficiency is increased by 5%-10%. Finally, the efficiency of experimental results is compared with theory value, and the reasons of experimental errors are given. It is found that if tips introduced by experiment errors can be removed, the efficiency will be increased greatly, which provide bases on getting better gratings and higher diffraction efficiency.