高精度微结构聚合物光栅的复制技术

光栅复制是降低光栅制造成本,提高产量的一条有效途径。研究了利用紫外压印技术复制微结构光栅的方法。使用玻璃基底矩形浮雕结构的微结构光栅作为母光栅,给出了利用聚二甲基硅氧烷(PDMS)制作光栅模具和在光敏聚合物材料上复制微结构光栅的详细过程。经过优化工艺条件,成功地复制了一系列不同周期和开口比的微结构光栅,测试了复制光栅和母光栅的衍射图像和0级与±1级的衍射强度,结果表明,复制光栅和母光栅的衍射图像与光强分布基本一致。

Grating replication is an effective way to low cost and increase production of gratings. By using ultraviolet (UV) imprint technology, the replication of micro-structure diffraction grating is studied. The micro-structure grating with rectangular surface relief and glass substrate is used as the original grating, and the detailed process of the fabrication of polydimethylsiloxane (PDMS) mode and replication technology on UV curable polymer are presented. Gratings with different periods and duty cycles have been replicated with an optimizing process. The diffraction images and diffraction intensity of 0 and ±1 orders of the replica and the original grating are measured, and the diffraction pattern and intensity of the replica gratings are close to that of the original grating.