基于强激光辐照固体锡靶产生极紫外光源的实验研究

建立了一套利用高功率YAG激光器辐照固体锡靶产生高转换效率极紫外光(extreme ultraviolet)源的实验装置.利用建立的实验装置开展了极紫外光源的强度和转换效率与抽运激光强度关系的实验研究,发现极紫外光源的转换效率随抽运激光强度的变化具有饱和效应.实验发现:当抽运激光能量达到250mJ时,极紫外光源的转换效率最高,波长为13.5nm处0.27nm带宽范围内的极紫外光源的能量转换效率为1.6%,此时对应的激光强度为1.8×1011W/cm2.

An experimental system has been set up for producing extreme ultraviolet light with high conversion efficiency by employing high power YAG laser irradiated tin slab. The dependence of extreme ultraviolet light intensity and conversion efficiency on the pump energy were studied, and the saturation effect of conversion efficiency was observed. The highest conversion efficiency of 1.6% in producing 13.5 nm extreme ultraviolet light with 0.27 nm bandwidth was achieved at pump energy of 250 mJ, which corresponds to an intensity of 1.8 x 10(11) W/cm(2).

Committee of Science and Technology of Shanghai, China [036105035]