An automatic imaging spectroscopic ellipsometer for characterization of nano-film pattern on solid substrate
Data(s) |
2008
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Resumo |
In order to characterize the physical and spatial properties of nano-film pattern on solid substrates, an automatic imaging spectroscopic ellipsometer (ISE) based on a polarizer - compensator - specimen - analyzer configuration in the visible region is presented. It can provide the spectroscopic ellipsometric parameters psi (x, y, lambda) and Delta (x, y, lambda) of a large area specimen with a lateral resolution in the order of some microns. A SiO2 stepped layers pattern is used to demonstrate the function of the ISE which shows potential application in thin film devices' such as high-throughput bio-chips. |
Identificador | |
Idioma(s) |
英语 |
Publicador |
Weinheim |
Fonte |
Physica Status Solidi C - Current Topics In Solid State Physics, Vol 5, No 5. 4th International Conference on Spectroscopic Ellipsometry (ICSE-4), Stockholm, SWEDEN. JUN 11-15, 2007, pp.1050-1053. |
Tipo |
会议论文 |