Self-consistent kinetic modeling of electron distribution function in a low-pressure inductively coupled plasma


Autoria(s): Yang Y; 吴汉明
Data(s)

1996

Resumo

Based upon the spatially inhomogeneous Boltzmann equation in two-term approximation coupled with electromagnetic and fluid model analysis for the recently developed inductively coupled plasma sources, a self-consistent electron kinetic model is developed. The electron distribution function, spatial distributions of the electron density and ionization rate are calculated and discussed.

Identificador

http://dspace.imech.ac.cn/handle/311007/39118

http://www.irgrid.ac.cn/handle/1471x/4905

Idioma(s)

英语

Fonte

Chinese Physics Letters.1996,13(6):447-450

Palavras-Chave #Discharge
Tipo

期刊论文