Dynamic Behaviour of Nanoscale Electrostatic Actuators

The dynamic behaviour for nanoscale electrostatic actuators is studied. A two Parameter mass-spring model is shown to exhibit a bifurcation from the case excluding an equilibrium point to the case including two equilibrium points as the geometrical dimensions of the device are altered. Stability analysis shows that one is a stable Hopf bifurcation point and the other is an unstable saddle point. In addition, we plot the diagram phases, which have periodic orbits around the Hopf point and a homoclinic orbit passing though the unstable saddle point.