七氟丁酸酐有序超薄膜的制备与结构


Autoria(s): 任嗣利; 杨生荣; 王金清; 齐尚奎; 赵亚溥
Data(s)

2001

Resumo

在涂敷有聚合物PEI涂层的单晶硅表面上制备了HFBA单层分子膜,接触角测量及XPS结果表明,HFBA在PEI表面产生了化学吸附发生了化学键合(酰胺键),形成了低表面能的HFBA单分子层膜.这一吸附反应的动力学行为可能表现为Langmuir单分子层化学吸附.

Heptafluorobutyric anhydride (HFBA) monolayer was prepared on polyethyleneimine (PEI) coated single crystal silicon substrate. It could be a promising candidate as lubricant for MEMs and micro - machines. The ultra - thin film was characterized by means of contact - angle measurement and X - ray photoelectron spectroscopy (XPS). The great variations of contact angles on the modified substrate indicated that an ordered monolayer of HFBA was obtained. The XPS results showed that the HFBA monolayer on PEI coating came into being in the presence of a covalent amide bond between the carboxylic groups and the amine groups. Furthermore, the adsorption of HFBA onto PEI surface could be described with Langmuir chemical monolayer adsorption.

Identificador

http://dspace.imech.ac.cn/handle/311007/16180

http://www.irgrid.ac.cn/handle/1471x/850

Idioma(s)

中文

Palavras-Chave #力学 #薄膜 #自组装单分子层膜 #七氟丁酸酐 #ultra-thin film #聚乙烯亚胺 #HFBA #微电子机械系统 #PEI #MEMs #SAMs
Tipo

期刊论文