Two-axis force sensing and control of a Reorientable scanning probe

This paper presents the design and implementation of a reorientable scanning probe that is capable of two-axis force sensing and control in the 2-D scanning (X-Z) plane. The probe is comprised of three major components, namely a compliant manipulator, laser measurement system, and magnetic actuation system. Control of the position and orientation of the probe tip is realized by means of magnetic actuation combined with a novel structural design. The design of the manipulator's compliance and that of the optical path of the laser measurement system together enable achieving sensitivity to lateral (X) forces that is nearly identical to that of normal (Z) forces. The achieved sensitivity ratio, of about 0.6, is significantly higher than that of conventional scanning probe systems. The theoretical bases for the structural design and the sensitivity of the two-axis force sensing system are presented. Subsequently, fabrication of the manipulator is described and the result of experimental evaluation of the scanning probe's features is discussed. The scanning probe is used to access the vertical and re-entrant features on the two sides of a cylindrical micropipette, which are subsequently scanned by regulating the lateral force of tip-sample interaction.