A novel method for diameter estimation of small opaque objects using Fraunhofer diffraction


Autoria(s): Vyas, Khushi; Lolla, Kameswara Rao
Contribuinte(s)

Gu, Zu-Han

Hanssen, Leonard M

Data(s)

2010

Resumo

A novel optical method is proposed and demonstrated, for real-time dimension estimation of thin opaque cylindrical objects. The methodology relies on free-space Fraunhofer diffraction principle. The central region, of such tailored diffraction pattern obtained under suitable choice of illumination conditions, comprises of a pair of `equal intensity maxima', whose separation remains constant and independent of the diameter of the diffracting object. An analysis of `the intensity distribution in this region' reveals the following. At a point symmetrically located between the said maxima, the light intensity varies characteristically with diameter of the diffracting object, exhibiting a relatively stronger intensity modulation under spherical wave illumination than under a plane wave illumination. The analysis reveals further, that the said intensity variation with diameter is controllable by the illumination conditions. Exploiting these `hitherto unexplored' features, the present communication reports for the first time, a reliable method of estimating diameter of thin opaque cylindrical objects in real-time, with nanometer resolution from single point intensity measurement. Based on the proposed methodology, results of few simulation and experimental investigations carried-out on metallic wires with diameters spanning the range of 5 to 50 mu m, are presented. The results show that proposed method is well-suited for high resolution on-line monitoring of ultrathin wire diameters, extensively used in micro-mechanics and semiconductor industries, where the conventional diffraction-based methods fail to produce accurate results.

Formato

application/pdf

Identificador

http://eprints.iisc.ernet.in/36356/1/SPIE_2010_Khushi_Vyas.pdf

Vyas, Khushi and Lolla, Kameswara Rao (2010) A novel method for diameter estimation of small opaque objects using Fraunhofer diffraction. In: Conference on Reflection, Scattering, and Diffraction from Surfaces II, AUG 02-04, 2010, San Diego, CA.

Publicador

The International Society for Optical Engineering.

Relação

http://spiedigitallibrary.org/proceedings/resource/2/psisdg/7792/1/779219_1?isAuthorized=no

http://eprints.iisc.ernet.in/36356/

Palavras-Chave #Instrumentation and Applied Physics (Formally ISU)
Tipo

Conference Paper

PeerReviewed