Reliability Analysis of Torsional MEMS Varactor
| Data(s) |
01/03/2008
|
|---|---|
| Resumo |
This paper discusses reliability issues in torsional MEMS varactor. Self-actuation due to high ac signals is analyzed, and solutions are proposed. The mode of failure at high actuation voltages is analyzed and established through experiments. Issues like stiction due to high voltages and effect of high residual stress are studied experimentally. |
| Formato |
application/pdf |
| Identificador |
http://eprints.iisc.ernet.in/26696/1/getPDF2.pdf Venkatesh, C and Bhat, N (2008) Reliability Analysis of Torsional MEMS Varactor. In: IEEE Transactions on Device and Materials Reliability, 8 (1). pp. 129-134. |
| Publicador |
IEEE |
| Relação |
http://ieeexplore.ieee.org/xpls/abs_all.jsp?arnumber=4399959 http://eprints.iisc.ernet.in/26696/ |
| Palavras-Chave | #Electrical Communication Engineering |
| Tipo |
Journal Article PeerReviewed |
