Some properties of indium-tin oxide-films
| Data(s) |
1977
|
|---|---|
| Resumo |
Thin films of indium-tin oxide have been deposited by DC diode sputtering from an indium-tin alloy target in an argon, hydrogen and oxygen atmosphere. Films with sheet resistance of 11 ohms/square and 80% light transmission have been obtained. The effect of cathode composition and gas mixture on sheet resistance and optical transmission properties of the films have been studied. |
| Formato |
application/pdf |
| Identificador |
http://eprints.iisc.ernet.in/24479/1/2.pdf Radhakrishna, MC and Rao, M Ramakrishna (1977) Some properties of indium-tin oxide-films. In: Paramana, 9 (1). pp. 1-6. |
| Publicador |
Indian Academy of Sciences |
| Relação |
http://www.springerlink.com/content/x3k768xk47602500/ http://eprints.iisc.ernet.in/24479/ |
| Palavras-Chave | #Others |
| Tipo |
Journal Article PeerReviewed |
