Low voltage EPMA: Experiments on a new frontier in microanalysis—analytical spatial resolution
| Data(s) |
2016
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|---|---|
| Resumo |
Field emission (FE) electron gun sources provide new capabilities for high lateral resolution EPMA. The determination of analytical lateral resolution is not as straightforward as that for electron microscopy imaging. Results from two sets of experiments to determine the actual lateral resolution for accurate EPMA are presented for Kα X-ray lines of Si and Al and Lα of Fe at 5 and 7 keV in a silicate glass. These results are compared to theoretical predictions and Monte Carlo simulations of analytical lateral resolution. The experiments suggest little is gained in lateral resolution by dropping from 7 to 5 keV in EPMA of this silicate glass. |
| Formato |
application/pdf |
| Identificador | |
| Publicador |
IOP Publishing Ltd |
| Relação |
http://eprints.qut.edu.au/85657/1/pdf DOI:10.1088/1757-899X/109/1/012003 Fournelle, J., Cathey, H., Pinard, P.T., & Richter, S. (2016) Low voltage EPMA: Experiments on a new frontier in microanalysis—analytical spatial resolution. In IOP Conference Series: Material Science and Engineering, IOP Publishing Ltd, Portoroz, Slovenia, Article Number: 012003. |
| Direitos |
Copyright 2015 The Author(s) Content from this work may be used under the terms of the Creative Commons Attribution 3.0 licence. Any further distribution of this work must maintain attribution to the author(s) and the title of the work, journal citation and DOI. Published under licence by IOP Publishing Ltd |
| Fonte |
School of Earth, Environmental & Biological Sciences; Faculty of Science and Technology; Institute for Future Environments |
| Palavras-Chave | #030101 Analytical Spectrometry #030301 Chemical Characterisation of Materials #040200 GEOCHEMISTRY |
| Tipo |
Conference Paper |
