Self-organized ZnO nanodot arrays : effective control using SiNx interlayers and low-temperature plasmas
Data(s) |
2012
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Resumo |
An advanced inductively coupled plasma (ICP)-assisted rf magnetron sputtering deposition method is developed to synthesize regular arrays of pear-shaped ZnO nanodots on a thin SiNx buffer layer pre-deposited onto a silicon substrate. It is shown that the growth of ZnO nanodots obey the cubic root-law behavior. It is also shown that the synthesized ZnO nanodots are highly-uniform, controllable by the experimental parameters, and also feature good structural and photoluminescent properties. These results suggest that this custom-designed ICP-based technique is very effective and highly-promising for the synthesis of property- and size-controllable highly-uniform ZnO nanodots suitable for next-generation light emitting diodes, energy storage, UV nanolasers, and other applications. |
Formato |
application/pdf |
Identificador | |
Publicador |
American Institute of Physics |
Relação |
http://eprints.qut.edu.au/74701/1/ZnO_nanodot_2012_HERDC_evidence.pdf DOI:10.1063/1.3673593 Huang, S. Y., Cheng, Q. J., Xu, S., Wei, D. Y., Zhou, H. P., Long, J. D., Levchenko, I., & Ostrikov, K. (2012) Self-organized ZnO nanodot arrays : effective control using SiNx interlayers and low-temperature plasmas. Journal of Applied Physics, 111(3), 036101. |
Direitos |
Copyright 2012 American Institute of Physics. |
Fonte |
School of Chemistry, Physics & Mechanical Engineering; Science & Engineering Faculty |
Tipo |
Journal Article |