Nonlinear electromagnetic fields in 0.5 MHz inductively coupled plasmas
Data(s) |
2003
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Resumo |
Radial profiles of magnetic fields in the electrostatic (E) and electromagnetic (H) modes of low-frequency (∼500) inductively coupled plasmas (ICP) were measured using miniature magnetic probes. A simplified plasma fluid model explaining the generation of the second harmonics of the azimuthal magnetic field in the plasma source was proposed. Because of apparent similarity in the procedure of derivation of the pondermotive force-caused nonlinear terms, pronounced generation of the nonlinear static azimuthal magnetic field could be expected. |
Formato |
application/pdf |
Identificador | |
Publicador |
American Institute of Physics |
Relação |
http://eprints.qut.edu.au/74189/1/74189.pdf DOI:10.1063/1.1557871 Ostrikov, K., Tsakadze, E., Xu, S., Vladimirov, S.V., & Storer, R. (2003) Nonlinear electromagnetic fields in 0.5 MHz inductively coupled plasmas. Physics of Plasmas, 10(4), pp. 1146-1151. |
Direitos |
Copyright 2003 American Institute of Physics |
Fonte |
Science & Engineering Faculty |
Tipo |
Journal Article |