Effect of an internal rotating current on low-frequency inductively coupled plasmas
| Data(s) |
2001
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|---|---|
| Resumo |
The effects of an inductively rotating current were observed on low-frequency inductively coupled plasmas. The spatial distribution of electromagnetic fields was investigated in a cylindrical metallic chamber filled with dense plasma. The distribution of the magnetic field in plasma chamber was observed for rarefied and dense plasmas. The plasma was assumed as uniform in the electromagnetic fields. The results showed the plasma density increased with power and the electron density increased with pressure. |
| Formato |
application/pdf |
| Identificador | |
| Publicador |
American Physical Society |
| Relação |
http://eprints.qut.edu.au/74021/1/74021.pdf DOI:10.1103/PhysRevE.63.046402 Tsakadze, E.L., Ostrikov, K., Xu, S., Jones, I.R., Storer, R., Yu, M.Y., & Lee, S. (2001) Effect of an internal rotating current on low-frequency inductively coupled plasmas. Physical Review E (Statistical, Nonlinear, and Soft Matter Physics), 63(4), 046402-1---9. |
| Direitos |
Copyright 2001 American Physical Society |
| Fonte |
Science & Engineering Faculty |
| Tipo |
Journal Article |
