Bistability and hysteresis in inductively coupled plasmas
Data(s) |
2000
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Resumo |
The transition between the two stable operation regimes (E and H discharge modes) in inductively coupled argon plasmas has been studied experimentally and theoretically. Analogy with other physical phenomena exhibiting hysteresis has been drawn. Analysis of power balance, electromagnetic field, plasma parameters, densities of the excited states, and optical emission spectra shows that the hysteresis may be due to nonlinearities associated with step-wise ionization through excited states of the argon atoms. |
Identificador | |
Publicador |
Institute of Physics Publishing Ltd |
Relação |
DOI:10.1238/Physica.Regular.062a00189 Ostrikov, K., Xu, S., & Lee, S. (2000) Bistability and hysteresis in inductively coupled plasmas. Physica Scripta, 62(2-3), pp. 189-193. |
Fonte |
Science & Engineering Faculty |
Tipo |
Journal Article |