Power transfer and mode transitions in low-frequency inductively coupled plasmas


Autoria(s): Ostrikov, K.; Xu, S.; Yu, M.Y.
Data(s)

2000

Resumo

Operation and mode jumps in low-frequency (500 kHz) radio-frequency inductively coupled plasmas are investigated. The discharge is driven by a flat inductive coil which can excite the electrostatic (E) and electromagnetic (H) discharge modes. The power transfer efficiency and mode transition behavior are studied. It is found that the power reflection coefficient as a function of the input power is minimal in the vicinity of the mode transitions and exhibits hysteresis, which is also observed when the operating gas pressure is varied.

Formato

application/pdf

Identificador

http://eprints.qut.edu.au/73881/

Publicador

American Institute of Physics

Relação

http://eprints.qut.edu.au/73881/1/73881%28pub%29.pdf

DOI:10.1063/1.1289055

Ostrikov, K., Xu, S., & Yu, M.Y. (2000) Power transfer and mode transitions in low-frequency inductively coupled plasmas. Journal of Applied Physics, 88(5), pp. 2268-2271.

Direitos

Copyright 2000 American Institute of Physics

Fonte

Science & Engineering Faculty

Tipo

Journal Article