Different nanostructures from different plasmas : nanoflowers and nanotrees on silicon
| Data(s) |
2011
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|---|---|
| Resumo |
Using the advanced radio-frequency plasma-assisted magnetron deposition system, various nanostructures such as nanoflowers of carbon nanotubes, ZnO nanobelts, and silicon nanotrees were successfully synthesized. In this paper, we present the photographs of ICP and magnetron discharges, the photograph of a complex plasma structure, and the SEM images of various nanostructures synthesized in the system with magnetron and ICP sources operating simultaneously. |
| Identificador | |
| Publicador |
IEEE |
| Relação |
DOI:10.1109/TPS.2011.2159022 Ostrikov, K., Kumar, S., Cheng, Q.J., Rider, A.E., Yajadda, M.M.A., Han, Z.J., Seo, D.H., van der Laan, T.A., Yick, S., Tam, E., & Levchenko, I. (2011) Different nanostructures from different plasmas : nanoflowers and nanotrees on silicon. IEEE Transactions on Plasma Science, 39(11), pp. 2796-2797. |
| Fonte |
Science & Engineering Faculty |
| Palavras-Chave | #II-VI semiconductors #carbon nanotubes #elemental semiconductors #nanofabrication #plasma deposition |
| Tipo |
Journal Article |
