Growth of diamond-like carbon films using low energy ion beam sputter - bombardment deposition with Ar ions
| Data(s) |
2008
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|---|---|
| Identificador | |
| Publicador |
IOP Publishing |
| Relação |
DOI:10.1088/1742-6596/100/8/082009 Rybachuk, Maksym & Bell, John (2008) Growth of diamond-like carbon films using low energy ion beam sputter - bombardment deposition with Ar ions. Journal of Physics, 100(8), pp. 1-4. |
| Fonte |
Faculty of Built Environment and Engineering; School of Engineering Systems |
| Palavras-Chave | #020204 Plasma Physics; Fusion Plasmas; Electrical Discharges #020400 CONDENSED MATTER PHYSICS #090400 CHEMICAL ENGINEERING #Deposition by Sputtering, Nucleation and Growth, Carbon, Ion Deposition, Thin Films |
| Tipo |
Journal Article |
