XPS and 19F NMR Study of the Photodegradation at 157 nm of Photolithographic-Grade Teflon AF Thin Films
Data(s) |
2005
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Identificador | |
Publicador |
American Chemical Society |
Relação |
Blakey, Idriss, George, Graeme, Hill, David, Liu, Heping, Rasoul, Firas, Whittaker, Andrew, & Zimmerman, Paul (2005) XPS and 19F NMR Study of the Photodegradation at 157 nm of Photolithographic-Grade Teflon AF Thin Films. Macromolecules, 38, pp. 4050-4053. |
Fonte |
Faculty of Science and Technology |
Palavras-Chave | #030300 MACROMOLECULAR AND MATERIALS CHEMISTRY |
Tipo |
Journal Article |