A Study on the Thermal Behavior of Fabrication Processes for Micro-accelerometer by SOI Wafers
| Data(s) |
2002
|
|---|---|
| Identificador | |
| Publicador |
Elsevier Science Ltd |
| Relação |
Jeong, Young-Jae, Kim, Ill-Soo, Kim, O-S, & Yarlagadda, Prasad (2002) A Study on the Thermal Behavior of Fabrication Processes for Micro-accelerometer by SOI Wafers. Journal of Materials Processing Technology, 130-131, pp. 680-684. |
| Fonte |
Faculty of Built Environment and Engineering |
| Tipo |
Journal Article |
