Low power consumption and high sensitivity carbon monoxide gas sensor using indium oxide nanowire.

In this paper, micro gas sensor was fabricated using indium oxide nanowire for effective gas detection and monitoring system. Indium oxide nanowire was grown using thermal CVD, and their structural properties were examined by the SEM, XRD and TEM. The electric properties for microdropped indium oxide nanowire device were measured, and gas response characteristics were examined for CO gas. Sensors showed high sensitivity and stability for CO gas. And with below 20 mw power consumption, 5 ppm CO could be detected.

Multi-field simulations and characterization of CMOS-MEMS high-temperature smart gas sensors based on SOI technology

This paper describes multiple field-coupled simulations and device characterization of fully CMOS-MEMS-compatible smart gas sensors. The sensor structure is designated for gas/vapour detection at high temperatures (>300 °C) with low power consumption, high sensitivity and competent mechanic robustness employing the silicon-on-insulator (SOI) wafer technology, CMOS process and micromachining techniques. The smart gas sensor features micro-heaters using p-type MOSFETs or polysilicon resistors and differentially transducing circuits for in situ temperature measurement. Physical models and 3D electro-thermo-mechanical simulations of the SOI micro-hotplate induced by Joule, self-heating, mechanic stress and piezoresistive effects are provided. The electro-thermal effect initiates and thus affects electronic and mechanical characteristics of the sensor devices at high temperatures. Experiments on variation and characterization of micro-heater resistance, power consumption, thermal imaging, deformation interferometry and dynamic thermal response of the SOI micro-hotplate have been presented and discussed. The full integration of the smart gas sensor with automatically temperature-reading ICs demonstrates the lowest power consumption of 57 mW at 300 °C and fast thermal response of 10 ms. © 2008 IOP Publishing Ltd.

Oscillatory sensitivity patterns for global modes in wakes

Globally unstable wakes with co-flow at intermediate Reynolds numbers are studied, to quantify important spatial regions for the development and control of the global instability. One region of high structural sensitivity is found close to the inlet for all wakes, in agreement with previous findings for cylinder wakes. A second, elongated region of high structural sensitivity is seen downstream of the first one for unconfined wakes at Re = 400. When base flow modifications are considered, a spatially oscillating sensitivity pattern is found inside the downstream high structural sensitivity region. This implies that the same change in the base flow can either destabilize or stabilize the flow, depending on the exact position where it is applied. It is shown that the sensitivity pattern remains unchanged for different choices of streamwise boundary conditions and numerical resolution. Actual base flow modifications are applied in selected configurations, and the linear global modes recomputed. It is confirmed that the linear global eigenvalues move according to the predicted sensitivity pattern for small amplitude base flow modifications, for which the theory applies. We also look at the implications of a small control cylinder on the flow. Only the upstream high sensitivity region proves to be robust in terms of control, but one should be careful not to disturb the flow in the downstream high sensitivity region, in order to achieve control. The findings can have direct implications on the numerical resolution requirements for wakes at higher Reynolds numbers. Furthermore, they provide one more possible explanation to why confined wakes have a more narrow frequency spectrum than unconfined wakes.

How to achieve ultra high photoconductive gain for transparent oxide semiconductor image sensors

We present quantitative analysis of the ultra-high photoconductivity in amorphous oxide semiconductor (AOS) thin film transistors (TFTs), taking into account the sub-gap optical absorption in oxygen deficiency defects. We analyze the basis of photoconductivity in AOSs, explained in terms of the extended electron lifetime due to retarded recombination as a result of hole localization. Also, photoconductive gain in AOS photo-TFTs can be maximized by reducing the transit time associated with short channel lengths, making device scaling favourable for high sensitivity operation. © 2012 IEEE.

Active control of high frequency vibration in uncertain structures

The active suppression of structural vibration is normally achieved by either feedforward or feedback control. In the absence of a suitable reference signal feedforward control cannot be employed and feedback control is the only viable approach. Conventional feedback control algorithms (e.g. LQR and LQG) are designed on the basis of a mathematical model of the system and ideally the performance of the system should be robust against uncertainties in this model. The aim of this paper is to numerically investigate the robustness of LQR and LQG algorithms by designing the controller for a nominal system, and then assessing (via Monte Carlo simulation) the effects of uncertainties in the system. The ultimate concern is with the control of high frequency vibrations, where the short wavelength of the structural deformation induces a high sensitivity to imperfection. It is found that standard algorithms such as LQR and LQG are generally unfeasible for this case. This leads to a consideration of design strategies for the robust active control of high frequency vibrations. The system chosen for the numerical simulation concerns two coupled plates, which are randomized by the addition of point masses at random locations.

High-resolution strain sensing on steel by Silicon-On-Insulator flexural resonators fabricated with chip-level vacuum packaging

This paper reports on the fabrication and characterization of high-resolution strain sensors for steel based on Silicon On Insulator flexural resonators manufactured with chip-level LPCVD vacuum packaging. The sensors present high sensitivity (120 Hz/μ), very high resolution (4 n), low drift, and near-perfect reversibility in bending tests performed in both tensile and compressive strain regimes. © 2013 IEEE.

Design and coupled-effect simulations of CMOS micro gas-sensors built on SOI thin membranes

This paper describes coupled-effect simulations of smart micro gas-sensors based on standard BiCMOS technology. The smart sensor features very low power consumption, high sensitivity and potential low fabrication cost achieved through full CMOS integration. For the first time the micro heaters are made of active CMOS elements (i.e. MOSFET transistors) and embedded in a thin SOI membrane consisting of Si and SiO2 thin layers. Micro gas-sensors such as chemoresistive, microcalorimeteric and Pd/polymer gate FET sensors can be made using this technology. Full numerical analyses including 3D electro-thermo-mechanical simulations, in particular stress and deflection studies on the SOI membranes are presented. The transducer circuit design and the post-CMOS fabrication process, which includes single sided back-etching, are also reported.

Design and simulations of SOI CMOS micro-hotplate gas sensors

This paper describes a new generation of integrated solid-state gas-sensors embedded in SOI micro-hotplates. The micro-hotplates lie on a SOI membrane and consist of MOSFET heaters that elevate the operating temperature, through self-heating, of a gas sensitive material. These sensors are fully compatible with SOI CMOS or BiCMOS technologies, offer ultra-low power consumption (under 100 mW), high sensitivity, low noise, low unit cost, reproducibility and reliability through the use of on-chip integration. In addition, the new integrated sensors offer a nearly uniform temperature distribution over the active area at its operating temperatures at up to about 300-350°C. This makes SOI-based gas-sensing devices particularly attractive for use in handheld battery-operated gas monitors. This paper reports on the design of a chemo-resistive gas sensor and proposes for the first time an intelligent SOI membrane microcalorimeter using active micro-FET heaters and temperature sensors. A comprehensive set of numerical and analogue simulations is also presented including complex 2D and 3D electro-thermal numerical analyses. © 2001 Elsevier Science B.V. All rights reserved.

Magnetic switching and anisotropy in nanomagnets: the influence of size and shape

Arrays of nanomagnets were fabricated out of Ni80Fe14Mo5 in the lateral size range 500-30nm and the thickness range 3-20nm. Elliptical, triangular, square, pentagonal and circular geometries were all considered. The magnetic properties of these nanomagnets were probed rapidly and non-invasively using a high sensitivity magneto-optical method.

Controlling magnetic ordering in coupled nanomagnet arrays

We have fabricated using high-resolution electron beam lithography circular magnetic particles (nanomagnets) of diameter 60 nm and thickness 7 nm out of the common magnetic alloy supermalloy. The nanomagnets were arranged on rectangular lattices of different periods. A high-sensitivity magneto-optical method was used to measure the magnetic properties of each lattice. We show experimentally how the magnetic properties of a lattice of nanomagnets can be profoundly changed by the magnetostatic interactions between nanomagnets within the lattice. We find that simply reducing the lattice spacing in one direction from 180 nm down to 80 nm (leaving a gap of only 20 nm between edges) causes the lattice to change from a magnetically disordered state to an ordered state. The change in state is accompanied by a peak in the magnetic susceptibility. We show that this is analogous to the paramagnetic-ferromagnetic phase transition which occurs in conventional magnetic materials, although low-dimensionality and kinetic effects must also be considered.