Semiconductor measurement technology : techniques for measuring the integrity of passivation overcoats on integrated circuits /

Mode of access: Internet.

ARPA/NBS workshop III : test patterns for integrated circuits /

Consists of synopses of talks and discussions presented at the workshop held Sept. 6, 1974 in Scottsdale, Ariz.

Metrology for submicrometer devices and circuits /

"Issued June 1980."

Accurate linewidth measurements on integrated-circuit photomasks /

"Supported by the Defense Advanced Research Projects Agency ... and the National Bureau of Standards."

Computer program for designing optimal networks with MOS gates,

Thesis-University of Illinois at Urbana-Champaign.

Test patterns NBS-28 and NBS-28A : random fault interconnect step coverage and other structures /

S/N 003-003-02297-7.

A production-compatible microelectronic test pattern for evaluating photomask misalignment /

Includes bibliographical references.

Angular sensitivity of controlled implanted doping profiles /

Includes bibliographical references.

Automated photomask inspection /

Includes bibliographical references.